发明名称 DEVICE FOR CONTINUOUS HEAT TREATMENT
摘要 PURPOSE:To carry out heat treatment continuously while objects to be treated are carried in and out without disturbance of the atmosphere in the main chamber by a method wherein the inlet and outlet of the main chamber for heat treatment are provided with reserve chambers, and an operable partition plate is provided between each chamber. CONSTITUTION:The first partition plate 10 is opened, and then an object 7 to be treated is introduced to the first reserve chamber 8 by means of a carry-in part 5. Next, the partition 10 is closed, the atmospheric gas in the chamber 1 being introduced to the chamber 8 through a vent 14 provided in the second partition 11, and the gas present in the chamber 8 being then exhausted through an exhaust port 16. The partition 11 is opened, and then the object 7 in the chamber 8 is introduced to the chamber 1 by means of a carrier system 4. Successively, the partition 11 plate is closed, and the next object 7 is introduced by opening the partition plate 10. Continuous heat treatment is carried out by repetition of this operation.
申请公布号 JPS6027143(A) 申请公布日期 1985.02.12
申请号 JP19830137105 申请日期 1983.07.25
申请人 MITSUBISHI DENKI KK 发明人 NAGATA KAZUSHI
分类号 H01L21/677;C21D1/00;H01L21/00;H01L21/22;H01L21/67;H01L21/68 主分类号 H01L21/677
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