| 摘要 |
PURPOSE:To obtain an optical waveguide of a large size and a high NA, which can be connected to an optical fiber of a large aperture, etc. by repeating a formation of a film-like membrane and a selective optical polymerization, laminating and forming a thin type optical waveguide, and obtaining an optical waveguide of a thick film. CONSTITUTION:The quantity of a cast solution is adjusted so that the film thickness becomes 60mum. Subsequently, gaseous nitrogen is allowed to flow for 150min by 100ml/ min in a state that a case vessel 10 is half closed up tightly, and thereafter, an MA vapor is allowed to flow for 30min, a solvent and a part of a monomer are evaporated, and a half solid film 17 is prepared. Subsequently, both horizontal and vertical end faces of a photomask plate 12 are allowed to adhere tightly to positioning L-shaped metallic fittings 14, and ultraviolet rays 16 are irradiated for 15min. As for a part 19 which is not masked, an optical polymerization is caused, and it is converted to a polymer. That is a core part 18 being a high refractive index layer, and a clad part 19 being a low refractive index layer are formed, and first of all, a thin type optical waveguide 20 of the first layer is formed. In the same way, the thin type optical waveguide is laminated to the third layer from the first layer, and a large-sized optical waveguide whose film thickness is 180mum can be formed. |
