| 摘要 |
PURPOSE:To control the sensitivity correctly regardless of the error of component by providing a means for adjusting the variation of pressure applied to the fluid injection pad which injects the fluid to the face of supporting member and the rate of the variation of clearance with respect to said variation of pressure. CONSTITUTION:Guide 1 is extended in a slider frame 2. Pad 3A-3D are provided in said slider frame communicated with a compressor so as to inject the fluid toward the guide face. Pad 3A, 3B maintain the vertical position of slider frame 2, and pad 3C, 3D maintain the holizontal position of it. Each pad is individually provided with the fluid of defferent pressure so as to achieve the same sensitivity, since the clearance between each pad and guide 1 is not constant. |
