| 摘要 |
<p>PURPOSE:To equalize the characteristics of image sensors and to eliminate the irregularity of contrasts of the sensors by guiding atmospheric gas from one end of a furnace quartz tube into the tube, diffusing a heat treating position, and exhausting from both side ends of the tube. CONSTITUTION:A stainless steel pipe 13 is secured to a stainless steel flange 12 at the end of a quartz tube 6, and a quartz pipe 14 is connected to the pipe 13 in the tube 6 of a furnace body. A diffusing hole is opened at the pipe 14 on a heat treating position 7 set with a box-shaped boat 9, and N2 gas supplied from the pipe 13 is discharged on the boat 9. The diffusing holes are laterally symmetrically opened to the center line C of a substrate 3. The gas is exhausted from an exhaust hole 16 opened at the left end of the tube 6, and an exhaust hole 17 opened at the cover 10 of the left end.</p> |
