| 摘要 |
PURPOSE:To attain a film thickness and a pattern width of a part, which should be the magnetic pole tip part of an upper magnetic layer, with a high precision by forming the part, which should be the magnetic pole tip part, and the other parts of the upper magnetic layer, which constitutes a U-shaped magnetic pole, independently of each other by adhesion. CONSTITUTION:A lower magnetic layer 12 and a gap layer 13 are formed into prescribed patterns on a nonmagnetic substrate 11 by the plating method or the like. The first upper magnetic layer 14a consisting of ''Permalloy '' or the like is patterned into a prescribed shape with a prescribed thickness in the region, where a gap part should be constituted, on the gap layer 13. An insulating layer 15, a coil conductor layer 16, and an insulating layer 17 are formed in the other regions on the gap layer 13 in order by lamination. Insulating layers 15 and 17 are patterned simultaneously. After the second upper magnetic layer 14b consisting of ''Permalloy '' is adhered onto the insulating layer 17 and a part of the first upper magnetic layer 14a on the substrate 11, which is constituted in this manner, by sputtering or the like, the substrate 11 is patterned into a prescribed shape by the photolithographic method or the like. |
