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发明名称
MASTER SLICE
摘要
申请公布号
JPS6010643(A)
申请公布日期
1985.01.19
申请号
JP19840047328
申请日期
1984.03.14
申请人
INTERN BUSINESS MACHINES CORP
发明人
JIEEMUZU UIRIAMU DEEBISU;FURANKU DEYUAN JIYOONZU;BIKUTAA SUCHIYUWAATO MUUA;NANDOO GIORUJII TOOMA
分类号
H01L21/822;G06F17/50;H01L21/82;H01L27/04;H01L27/118;H03K19/173;(IPC1-7):H01L21/82
主分类号
H01L21/822
代理机构
代理人
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