| 摘要 |
PURPOSE:To improve the processing capacity by automatically selecting the minimum necessary measuring items in a plurality of semiconductor product lots driving measurement when measuring electric properties of the products to reduce the items, thereby shortening the measuring time. CONSTITUTION:A test program 12 and a data analyzer 14 are connected to a tester 11 of a semiconductor measuring system, and electric properties of an IC 13 to be measured are measured in the order of the program 12 by the tester 11. Various measuring conditions set by the IC13 and the program 12 are connected to the test head matrix 24 of the tester 11. The program input is stored by an input unit 30 through an input/output unit I/O 29, and a CPU21 in a test memory 25. A measuring unit 22, a measuring power source 23 and the matrix 24 are controlled by the CPU21 in accordance with the stored content of the memory 25, thereby setting the inputting conditions of the IC13. The measuring items are automatically selected to shorten the measuring time, thereby improving the processing capacity. |
