摘要 |
PURPOSE:To eliminate phase difference contrast which gives adverse effect on judgement of fine structure and observe high resolution non-interference image consisting of only scattering contrast by superposing a fine modulation current in the form of a pulse on an excitation current of objective. CONSTITUTION:A phase difference contrast is lowered and drop of resolution of image by aberration is reduced the image of an electron microscope by superposing a minute modulation current in the form of a pulse on an excitation current of objective of the transparent type electron microscope. Thereby, in case of observing image with high resolution through a transparent type electron microscope, it can be observed as the non-interference or partial inference image and a fine structure can be analyzed accurately by adequately lowering, in accordance with the object, phase difference contrast which formerly interferes judgment of fine structure such as metal particles on the amorphous support film etc. |