摘要 |
PURPOSE:To obtain a high resolution picture due to sample current by connecting an electric field irradiation electrode to a sample and this electric field irradiation electrode to a pull-down power supply through a high resistor and arranging an electronic amplification detector opposed to the electric field irradiation electrode. CONSTITUTION:An electric field irradiation electrode N is pin-shaped and is connected to a pull-down power supply L through a high resistor R and then a sample S and the electric field irradiation electrode N are connected. A scintilator C is connected to the positive side of a power supply U and a photomultiplier PM is arranged at the rear. When sample current SC is applied, the potential of the electrode N increases and decreases depending on the direction and size and an electric field irradiation electron irradiated from the electrode N increases and decreases accordingly. This electron is amplified and detected by combining the scintilator C and the photomultiplier PM. When the sample current SC is set to the direction where it is applied to the sample, the smaple potential decreases and the electric field irradiation current increases. Suppose irradiation resistance is r and the current applied to a resistor R is I' and then R>>r, I' is exceedingly reduced and the sample current is almost all converted into the electric field irradiation current. |