| 摘要 |
PURPOSE:To prevent crack of dried graphite film and blister-like swell after exfoliation and baking by avoiding direct touch of dry air on the corner areas of funnel glass. CONSTITUTION:The holes 8 in diameter of 2phi are opened at intervals of 2mm. on the surface along the bulb axis center line of a polyvinylchloride pipe 6 and the pipes are arranged in a cross. A funnel support 9 is provided above those pipes and the funnel glass coated with the graphite film 4 is set with the aperture 2 located at the lower side and the short side or long side of aperture 2 placed almost in parallel with one of the crossing dry pipes 6. The normal temperature and dehumidified air 7 with a dew point of 0 deg.C-5 deg.C and pressure of 0.5kg/cm<2> is sent from the pipe 6. Namely, flow of air 7 to the corner 5 of funnel glass 1 dries the graphite film 4, owing to indirect flow of air 7 due to turbulent air flow from the area 12 indicated by the oblique lines. |
