发明名称 Method of making planarizing non-conductive layers employing conductive metals
摘要 During the manufacture of Josephson junction devices, it is necessary to provide superconducting layers for electrodes. During the manufacture of semiconductors, it is necessary to provide conductive paths and leads. A layer of conducting metal or superconducting metal may be vacuum deposited in such a manner that any predetermined pattern or shape of normally conducting metal is made transversely non-conducting. The layer metal which is transversely non-conductive is vacuum deposited in the presence of an inert gas at a pressure which is high enough to cause the evaporated and deposited metal to form islands of conductive metal separated by insulating voids to provide gross electrical anisotropy.
申请公布号 US4486464(A) 申请公布日期 1984.12.04
申请号 US19820424923 申请日期 1982.09.27
申请人 SPERRY CORPORATION 发明人 YOUNG, PETER L.
分类号 H01L21/3205;C23C14/24;H01L23/52;H01L39/22;H01L39/24;(IPC1-7):H01L39/24 主分类号 H01L21/3205
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