METHOD OF GRINDING SAPPHIRE WAFER,申请号SU19813358451-传众专利搜索

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发明名称	METHOD OF GRINDING SAPPHIRE WAFER
摘要
申请公布号	SU1127526(A3)	申请公布日期	1984.11.30
申请号	SU19813358451	申请日期	1981.11.16
申请人	TOKIO SIBAURA DENKI KABUSIKI KAJSYA;TOSIBA KERAMIKS KO,óT¯ (´ôPMA)	发明人	ITIRO KATO,JP;SIGEKAZU SUZUKI,JP
分类号	B24B7/22;B24B1/00;B24B7/04;B24B7/16;H01L21/304;H01L21/86;(IPC1-7):B24B7/22	主分类号	B24B7/22
代理机构		代理人
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