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发明名称
A PLASMA PROCESSING CHAMBER
摘要
申请公布号
GB2093266(B)
申请公布日期
1984.11.21
申请号
GB19820001783
申请日期
1982.01.22
申请人
LAM REESEARCH CORP
发明人
分类号
B01J19/08;H01J37/16;H01J37/32;H01L21/205;H01L21/302;(IPC1-7):H01J37/00
主分类号
B01J19/08
代理机构
代理人
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