MASKLESS EXPOSURE DEVICE AND MASKLESS EXPOSURE METHOD USING THE SAME

摘要

Provided is a maskless exposure apparatus which can sense the behavior of an exposure head. The maskless exposure apparatus comprises: multiple exposure heads which comprise a digital micro-mirror device (DMD) for reflecting a source beam supplied from a light source onto a substrate to scan exposure beams on the substrate, and are alternately arranged in a first row and a second row; multiple reflecting members arranged on the sides of the exposure heads, wherein reflection planes are arranged in parallel; a light emitting part supplying light to the reflecting members; and a light receiving part receiving the light supplied from the light emitting part via the reflecting members.