NEUTRAL PARTICLE IMPLANTING METHOD AND ITS DEVICE,申请号JP19830070233-传众专利搜索

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发明名称	NEUTRAL PARTICLE IMPLANTING METHOD AND ITS DEVICE
摘要
申请公布号	JPS59196600(A)	申请公布日期	1984.11.07
申请号	JP19830070233	申请日期	1983.04.21
申请人	KOGYO GIJUTSUIN (JAPAN)	发明人	SHIMIZU KEIZOU
分类号	H05H1/22;H01J37/317;H01L21/265	主分类号	H05H1/22
代理机构		代理人
主权项
地址

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