| 摘要 |
PURPOSE:To make a semiconductor integrated circuit device to be provided with the necessary test function simply and moreover only by allotting small area by a method wherein function testing signal generating parts are formed of photoelectric converting elements provided toegether with the inside circuit of the IC device. CONSTITUTION:Photoelectric converting elements PS are provided together with the inside circuit 12 of an IC device 10 to be connected to electric source terminals Vcc, Vbb through resistors R to construct test signal generating parts T. A signal is sent from a node between the element PS and the resistor R to make the holding condition of a circuit F/F consisting of CMOS transistors of two groups to be set forcibly to any one side. Such test signal generating parts T are provided at the respective parts of the inside circuit 12, testing points T1,...Tn of a large number are arranged, a beam of light L is irradiated to an arbitrary point Tx monitoring by making probes 24 to come in contact with terminal pads 14, and a test of function can be executed. At this construction, the necessary test function can be provided simply and moreover only by allotting small area without depending upon terminal pads having large occupying area and a complicated time-division system. |
