DEVICE FOR INSPECTING INTEGRATED CIRCUIT

摘要

PURPOSE:To enable to largely shorten the working of evaluation in research and development by a method wherein the titled device is so constructed as to automatically point out a test object circuit DUT with the possibility of the existence of considerably many non-defective parts even when the DUT is defective. CONSTITUTION:The group 1 of drivers supplies a discriminating sign to discriminate the DUT, a series of testing patterns, and the expected values thereof. A testing pattern driver 5 receives the testing pattern through the group 3 of signal lines and impresses it via group 6 of signal lines to the input terminals of the DUT. The group 8 of receivers receives the group 7 of response signals and then judges whether the signal level is over the fixed value or not. A judging circuit 10 judges agreement/disagreement by inputting the judged result 9 and the expected value signal 4 from the group 1 of drivers 1. A disagreement analyzing circuit 12 inputs a signal 11 for reporting the number of disagreement output terminals and thus analyzes the result of disagreement. A code holding circuit 14 inputs the DUT discriminating coded signal line 2 in said group 1 and the control signal 13 from said circuit 12 and then holds the DUT discriminating code. A disagreement bit accumulated holding circuit 20 accumulates the bit information corresponding to each output terminal.