| 摘要 |
PURPOSE:To perform flaw detection with high accuracy regardless of an inspection speed or a flaw length, by converting a signal level to a stationary state by performing correction based on the correlation of the defect length due to image pickup and the change in the inspection speed. CONSTITUTION:When the defect signal obtained from an image pickup device by the image picking-up of a material 1 to be inspected is judged by a comparator 4 to be converted to a defect length signal which is, in turn, applied through an A/D converter 5, the correlation formula of an optimum inspection speed and an optimum signal level stored in an operator 6 is selected to be applied to an operator 3 and the level of the defect signal due to image pickup through the A/ D converter 2 is corrected and converted to a stationary state. Therefore, flaw detection can be performed with high accuracy in a substantially stationary state regardless of the inspection speed and the defect length. |
