| 摘要 |
PURPOSE:The titled apparatus capable of rapidly changing the generating amount of a sublimable subsance corresponding to the variation of demand, constituted so as to control the flow control valves arranged to the outlets of a plurality of sublimable substance receiving containers in parallel to each other by detecting the pressure of the supply side of the sublimable substance. CONSTITUTION:In an apparatus wherein sublimable substance receiving containers 3a, 3b are heated in heating tanks 2a, 2b through a heating apparatus consisting of heat exchangers 1a-1, 1b-a and air recirculating fans 1a-2, 1b-2 by a heating medium flowing in a constant amount at a constant temp. and a predetermined sublimable substance is generated to be supplied to a treating process, the flow control valves 12a, 12b arranged to the above mentioned receiving containers 3a, 3b are controlled so as to make the pressure detected by the pressure gauge 8-1 provided on the buffer tank 9-1 connected to a header 10 constant to allow the generating amount of the sublimable substance in the side of the receiving containers 3a, 3b to rapidly change corresponding to the variation of demand on the side of the treating process 11.
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