| 摘要 |
PURPOSE:To prevent the compositional variation of an electroless plating liquid and the trouble in recirculation, by performing piping without using a valve. CONSTITUTION:In a system wherein a plating liquid is flowed out from an electroless plating tank 19 and passed through various machineries, that is, a pump 20, a heat exchanger 21, a chemical agent injecting and mixing chamber 22 and a filter 23 to be recirculated to said electroless plating tank 19, the use of a valve inhibiting the flow of the plating liquid is wholly excluded. The regulation of the flow amount of the plating stream is performed by changing the rotation number of a pump impeller and, because of this, an inverter 24 is connected to the pump 20. |
