| 发明名称 |
Process for enlarging the surface of a substrate |
| 摘要 |
Enlargement of a substrate surface (5) by irradiation with high-energy radiation (6) which leads to the formation of needles (10) in this surface (5). <IMAGE>
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| 申请公布号 |
DE3310331(A1) |
申请公布日期 |
1984.09.27 |
| 申请号 |
DE19833310331 |
申请日期 |
1983.03.22 |
| 申请人 |
SIEMENS AG |
发明人 |
F.,DR. KRIMMEL,EBERHARD |
| 分类号 |
B01J19/08;B01J37/34;C30B33/00;H01L21/263;H01L31/0236;(IPC1-7):B01J19/08;H01L31/18 |
主分类号 |
B01J19/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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