| 摘要 |
PURPOSE:To make an electrode film function as a protection film against the moisture in the air and the deposit of dust, etc. by adhering this electrode film by lamination on a semiconductor film before splitting the semiconductor film into each photoelectric conversion region. CONSTITUTION:Individual clear conductive films 11a, 11b, ... are isolation-formed on a clear insulation substrate 10. Next, an amorphous Si layer 12 is adhered over the entire surface of the substrate 10. This film 12 includes inside a P-I-N junction parallel with the film surface. Then, a back electrode film 13 is laminated on the film 12. The films 13 and 12 are fused and removed at the same time in the direction of thicknesses by irradiating adjacent gap parts with a laser beam, resulting in the exposure of a part of the films 11a, 11b,.... In this case, the interface between the films 12 and 13 is covered with the film 13 and therefore protected from the moisture in the air and the deposit of dust, etc. A connection electrode film 16 is adhered over the entire surface, and next a part in the width direction of the film 16 adhered to the adjacent gap parts 12' is removed over the longitudinal direction of said film by the irradiation with the laser beam. Thereby, the photoelectric conversion regions 14a, 14b,... are series- connected. |
