摘要 |
PURPOSE:To obtain a pickup tube having excellent emission characteristic and emission life by making sufficient degassing from the periphery of sealing area, particulary from the surface plate through the exhausting process wherein, while the sealing area made of indium metal is being cooled, the other area is heated up to a specified temperature and exhaustion is carried out during the degassing. CONSTITUTION:A hollow-ring-shaped jig 8 using a metal such as copper having good thermal conductivity is wound around the circumference of a target ring 7. During the degassing process due to the heating in the exhausting process, cooling water is supplied from a cooling water supply port 9 of the jig 8 and thereby the cooling water is discharged from the cooling water drain port 10, and the sealing part made of indium metal 6 of target ring 7 is cooled. For cooling, a coolant other than water may be used. The other area is heated up to about 200 deg.C and exhaustion is carried out during the degassing. |