| 摘要 |
PURPOSE:To obtain an X-Y base which can move at a low speed and has small speed deviation by supporting the base via a pneumatic bearing along extended strip rails and interposing the rails between drive rollers provided at the base. CONSTITUTION:When a motor 7 is intermittently driven, a Y base 2 and an X base 3 on the base 2 integrally move through a threaded rod 6. As a result, a wafer 15 is moved in a direction Y to an optical inspection unit. When a motor 13 is continuously rotated to rotate a roller 10a coaxial with a disc 12 at a low speed, it moves along a strip rail 11 together with a roller 10b while rotating, a base 9 integrally moves, and the base 3 moves in a direction X at a low speed. The rail 11 is interposed between rollers 10c and 10d to hold the attitude of the base 3. Since the base 9 is supported on a pneumatic bearing on the base 2, it can move lightly. Consequently, the wafer 15 can be continuously moved in the direction X to the optical inspection unit. According to this structure, no problems as the accuracy and frictions of feed threads occur, the bases can be moved at a low speed with small speed deviation, thereby inspecting in high reliability. |
