发明名称 ELECTRON BEAM EXPOSURE DEVICE
摘要 PURPOSE:To contrive to enhance precision of a fixing position for exposure by a method wherein a cassette is pressed against a stopper on a base according to elasticity of an elastic member. CONSTITUTION:When a lever 29 is pushed out, pressing of the protrusions 36a of a pair of pawls 36a against pins is released, the rollers 39 of the pawls are positioned in the recesses 38b of cams 38, and a cassette 4 is advanced being held. The cassette 4 is conveyed from an acceptor 27 to a base 6, and the tip comes in contact with a stopper 7. The lever 29 advances moreover, the rollers 39 are spread resisting against a spring 41 at the slant parts of the cams 38 making the rollers 40 of the pawls 36 to come in contact with the rear edge of the cassette 4 as it is, and the rollers 40 approach mutually. The cassette 4 is pressed against the stopper 7 by the prescribed pressure determined according to the spring 41 and inclinations of the slant parts of the cams 38. Accordingly, the tip side of the cassette 4 comes in contact with the stopper 7 uniformly, and when the cassette is clamped 8 on the base 6 in this condition, the cassette can be fixed with extremely high precision. When the lever 29 is advanced further, the recesses 38c of the cams and the rollers 39 are engaged together, and the rollers 40 approach to separate from the pawls 4a of the cassette.
申请公布号 JPS59124131(A) 申请公布日期 1984.07.18
申请号 JP19820234566 申请日期 1982.12.28
申请人 TOSHIBA KK 发明人 KISHI TSUGIO
分类号 H01L21/30;H01J37/34;H01L21/027;(IPC1-7):01L21/30 主分类号 H01L21/30
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