| 摘要 |
PURPOSE:To make it possible to arrange a current collecting electrode, which is effective for the countermeasure for power loss without causing short circuit faults, by flattening the surface of a light receiving electrode layer, which is formed by a light transmitting conducting layer, wherein a groove part is provided, and the current collecting electrode comprising a good conductor, which is filled in the groove part. CONSTITUTION:A light receiving surface electrode layer 8 is formed as follows: a light transmitting conducting layer 9 having a width of about 1mu is deposited on the entire main surface of an insulating substrate 1 by electron beam evaporation; a groove part 11 having a desired shape is provided by photolithography technology; said groove part 11 is filled with a powder state, low melting point material; the metal is heated and melted; and a current collecting electrode 10 comprising the low melting point metal is fixed to the groove part 11. The melting point of the light transmitting conducting layer 9 is about 500-600 deg.C. As for the low melting point metal, a solder, whose melting point is about 400 deg.C or less, e.g., in the vicinity of 200 deg.C, and intrinsic resistivity is small, is suitable. The current collecting electrode 10 is not largely protruded from the groove part 11 and is not deeply depressed. The surface of the light receiving surface electrode layer 8 can be made approximately flat. |
