Electron microscope of a scanning type

摘要

An electron microscope of a scanning type provided with two specimen stages for allowing specimens of a large size and a small size to be selectively and interchangeably observed. The microscope comprises an electron gun, a first objective lens for observing a small size specimen, a second objective lens for observing a large size specimen, the second objective lens being disposed in axial opposition to the electron gun with the first objective lens disposed therebetween. The specimen stage for the small size specimen is disposed in the vicinity of the first objective lens, while the specimen stage for the large size specimen is disposed near the focal plane of the second objective lens. Improved stability, high resolving power and simplified manipulatability are attained.