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摘要
申请公布号
JPS5996833(U)
申请公布日期
1984.06.30
申请号
JP19820191319U
申请日期
1982.12.20
申请人
发明人
分类号
H01L21/02;H01L21/66;H01L27/00;(IPC1-7):H01L21/66
主分类号
H01L21/02
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