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发明名称
METHOD AND APPARATUS FOR FORMING THIN FILM
摘要
申请公布号
JPS59104466(A)
申请公布日期
1984.06.16
申请号
JP19820212222
申请日期
1982.12.02
申请人
MATSUSHITA DENKI SANGYO KK
发明人
KUGIMIYA KOUICHI;FUKUMOTO MASANORI;OKADA SHIYOUZOU;YASUI JIYUUROU;SHINOHARA SHIYOUHEI
分类号
C23C16/08;C23C16/44;C23C16/448
主分类号
C23C16/08
代理机构
代理人
主权项
地址
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