发明名称 SUPPLY DEVICE OF RAW MATERIAL FOR VACUUM DEPOSITION
摘要 PURPOSE:To supply securely and stably a prescribed amt. of a metal for vapor deposition without scattering a molten metal by forming the vapor deposition metal in a vacuum deposition device into a bar shape, and supplying the same into a crucible for the molten vapor deposition metal by making use of a specific feeder. CONSTITUTION:A raw material metal for vapor deposition to be supplied into a crucible 1 for melting said metal in a vacuum deposition device is supplied in the from of a bar-like metal 3. The feeding of such metal 3 is accomplished by a method for dropping many bar-like metallic materials 3 contained in a supply part 5 onto a raw material base 4 of a raw material supply device 2 by the own weight. Such material is hooked by the pawl 8 of a chain 9 wound around two sprockets 7, 7 and is delivered so that the material is fed through a guide 11 made of a refractory material such as alumina, magnesia or the like into the crucible 1. The front end of the guide 11 used in this case is notched 13 longitudianlly and is tightened by a spring 14, etc., by which the dropping of the material 3 by gravity into the crucible is prevented.
申请公布号 JPS5993875(A) 申请公布日期 1984.05.30
申请号 JP19820201623 申请日期 1982.11.16
申请人 SEKISUI KAGAKU KOGYO KK 发明人 TABATA HIRONORI;HOTSUTA MASAHIRO;KOUNO YOUJI
分类号 C23C14/24 主分类号 C23C14/24
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