AN APPARATUS FOR CONTINUOUS TREATMENT OF A CONTINUOUS-LENGTH MATERIAL WITH LOW TEMPERATURE-PLASMA

摘要

Continuous sheet materials(F) are subjected to a superficial plasma discharge at low temp. and pressure by leading the material into and out of one or more plasma discharge chambers(1) via a series of subsidiary chambers(8,9) with roll nip seals(10,11). The sheet passes over a cathode(4) in the form of a rotating drum, parallel to the surface of which are mounted one or more rod anodes(5). Power is provided as appropriate to rotate the guide and rolls and the anode, to apply vacuum and to generate a high frequency discharge between the cathode and anode.