| 摘要 |
PURPOSE:To form a high-quality coating film by preventing the drying of a coating agent at the leading end part of a nozzle, by surrounding the leading end part of the nozzle by a cover material opened downwardly to always place the same in a solvent atmosphere with saturated vapor pressure. CONSTITUTION:When the dripping of a definite amount of a resist 12 to a substrate 5 from a nozzle 1 is finished, the substrate 5 begins to rotate and, at the same time, a solenoid valve 20 is opened and N2-gas is sent into ethyl acetate 18 in a tank 16. By this method, an ethyl acetate atmosphere 21 with almost saturated vapor pressure is generated in the tank 16 and passed through a connection pipe 15 to be purified by a filter 17 before being sent into a cover member 13. Therefore, the leading end part of the nozzle 1 surrounded by the cover member 13 is placed in the ethyl acetate atmosphere 21 with saturated vapor pressure and the drying of the resist 12 at the leading end of the nozzle is prevented. |
