发明名称 |
Induced crystallographic modification of aromatic compounds |
摘要 |
Materials that change crystal structure upon radiation with a beam of electrons have been found. These materials, such as perylene dianhydride, naphthalene dianhydride, and perylene tetracarboxylic diimide based compounds undergo a transformation from one crystalline structure to another upon exposure to energetic electrons. This transformation causes a change in optical, electrical, and solubility properties. In this manner, these materials are useful as resists for delineating patterns, as optical storage media, and/or in processes for producing patterns of conductive materials such as employed in semiconductor technology.
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申请公布号 |
US4443532(A) |
申请公布日期 |
1984.04.17 |
申请号 |
US19810288002 |
申请日期 |
1981.07.29 |
申请人 |
BELL TELEPHONE LABORATORIES, INCORPORATED |
发明人 |
JOY, DAVID C.;KAPLAN, MARTIN L.;SCHMIDT, PAUL H. |
分类号 |
G03F7/004;H01L51/30;(IPC1-7):H01L29/28 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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