发明名称 Induced crystallographic modification of aromatic compounds
摘要 Materials that change crystal structure upon radiation with a beam of electrons have been found. These materials, such as perylene dianhydride, naphthalene dianhydride, and perylene tetracarboxylic diimide based compounds undergo a transformation from one crystalline structure to another upon exposure to energetic electrons. This transformation causes a change in optical, electrical, and solubility properties. In this manner, these materials are useful as resists for delineating patterns, as optical storage media, and/or in processes for producing patterns of conductive materials such as employed in semiconductor technology.
申请公布号 US4443532(A) 申请公布日期 1984.04.17
申请号 US19810288002 申请日期 1981.07.29
申请人 BELL TELEPHONE LABORATORIES, INCORPORATED 发明人 JOY, DAVID C.;KAPLAN, MARTIN L.;SCHMIDT, PAUL H.
分类号 G03F7/004;H01L51/30;(IPC1-7):H01L29/28 主分类号 G03F7/004
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