| 摘要 |
<p>PURPOSE:To make it possible to easily obtain high purity gas by solid aluminum pieces provided in contact relation to a heater. CONSTITUTION:Gas to be purified is introduced into a hermetically sealed container 7 through a valve 1 and, after the container 7 is highly evacuated, a heater 4 is heated to melt solid aluminium pieces 5 contacting with said heater 5. Aluminum melted in this vacuum container 7 is scattered in all directions as molecular rays to be adhered to the internal wall surface of the container 7. After a series of these operations, the temp. of the heater 4 is lowered and, when the container is cooled, the valve 1 is opened to introduce gas to be purified. In addition, the purified gas is flowed out to a desired place by opening a valve 2.</p> |
