| 摘要 |
PURPOSE:To improve the certainty of the operation of an optical shutter array device where the light transmission state can be controlled electrically, by forming a transparent substrate, a thin film consisting of electrooptical materials formed on the surface of the transparent substrate, and an electrode which can apply a voltage to the thin film selectively and locally. CONSTITUTION:A target material including Pb, La, Zr, and Ti is used to form a thin film 2 having about 20mum thickness on a glass substrate 1 in about 1,000Angstrom / min sputter speed. The substrate 1 where the thin film is formed by sticking in this manner is subjected to heat treatment at a temperature of 670-750 deg.C. Individual electrodes 3a are arranged in parallel like crossties, and a common electrode 3b is arranged to face upper end parts of individual electrodes 3a. Consequently, when a voltage is applied across selected one of individual electrodes 3a and the common electrode 3b, the voltage is applied to a facing part 3c, and an electrooptic effect is generated in this part, and a transmitted light is modulated. Consequently, the facing part 3c forms an optical control part or a shutter part of a main body shutter array device 10. |
