| 摘要 |
PURPOSE:To measure the flatness of a foil material from the temperature distribution of the foil material, by mounting the foil material on the heating surface having excellent flatness, and detecting the surface temperature of the foil material under the state heating is performed so as not to impart thermal strain. CONSTITUTION:The surface of a fixed table 4 is uniformly heated by a heater and the like. A foil material 5 is heated so that thermal strain is not imparted to the foil. The surface temperature is detected by an infrared ray camera 6 and displayed on a display 8. From the temperature distribution on the surface of the foil material, the flatness of the foil material 5 can be measured. |
