摘要 |
A reflectometer for precisely measuring the reflectivities of mirrors by performing two sequential measurements each of which is related to a different function of the reflectivities of a reference mirror and the mirror under test. For the first measurement, the two mirrors are arranged so that a beam of light is reflected alternately from the reference mirror and from the test mirror to an output detector to produce an output signal related to the difference of the reflectivities. In the second measurement, the mirrors are positioned so that the beam passes to the output detector directly and, alternately, after reflection from first the reference mirror and then the test mirror, thereby producing an output signal related to the product of the reflectivities. The reflectivity of the test mirror is then calculated from the two output signal quantities.
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