UN DISPOSITIVO OPTOELECTRONICO DE DETECCION DE ERROR DE ENFOQUE.

摘要

An optical focusing-error detection device comprises a beam splitter arranged in the path of a radiation beam originating from a plane on which is to be focused, and a radiation-sensitive detection system comprising a plurality of detectors separated by narrow strips, a first strip being associated with a first one and a second strip with the second one of two subbeams formed by the beam splitter. By arranging the two separating strips at an acute angle relative to each other it is possible to ensure that the centers of the radiation spots formed in the detector plane by the subbeams are disposed on the separating strips when focusing is correct.