| 摘要 |
PURPOSE:To enable the fetching of a signal accurately corresponding to a pressure working on a diaphragm by fixing a diaphragm at the periphery and at the center thereof on an anchor disc of a large rigidity while a strain detection element is added to the surface opposite to the pressure receiving surface thereof. CONSTITUTION:A diaphragm 1 is made thicker at the periphery 2 and the center 3 and thinner at the intermediate section to form a distortion causing section 4 and two lines of shallow recesses 6 with a V-shaped section in a ring on the side of the pressure receiving surface 5 thereof. The diaphragm 1 is fixed on an anchor disc 9 of a large rigidity with screws 16 and 17 and strain gages 13, 14 and 15 are attached to the position off the position corresponding to the center of the recess 6 on the inner side of the distortion causing section 4. An output cable 18 with one end thereof connected to the strain gages 13-15 is led outside from the anchor disc 9 through an O ring 19 and an inert gas is sealed up into an internal spaces 20 of the diaphragm 1. |
