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发明名称
HIGH-RESOLUTION RESIST COMPOSITE
摘要
申请公布号
GB2064152(B)
申请公布日期
1984.02.08
申请号
GB19800037599
申请日期
1980.11.24
申请人
WE
发明人
分类号
H01L21/027;G03F7/039;G03F7/095;G03F7/26;(IPC1-7):G03C1/72
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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