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发明名称
PLASMA ION SOURCE
摘要
申请公布号
JPS5923432(A)
申请公布日期
1984.02.06
申请号
JP19820131930
申请日期
1982.07.30
申请人
HITACHI SEISAKUSHO KK
发明人
SAKUMICHI KUNIYUKI;OKADA OSAMI;OZASA SUSUMU;TOKIKUCHI KATSUMI;KOIKE HIDEKI;TAYA TOSHIMICHI;KOMATSUMOTO MITSUNORI;KOMATSU MITSUO
分类号
H01J27/02;H01J27/16;H05H7/08
主分类号
H01J27/02
代理机构
代理人
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