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发明名称
HIGH RESOLUTION POSITION SENSING APPARATUS
摘要
申请公布号
GB8334582(D0)
申请公布日期
1984.02.01
申请号
GB19830034582
申请日期
1983.12.29
申请人
VARIAN ASSOCIATES INC
发明人
分类号
G01B7/00;G01D5/22;(IPC1-7):G01D5/20
主分类号
G01B7/00
代理机构
代理人
主权项
地址
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