| 摘要 |
PURPOSE:To secure the uniqueness of a sensor output, by forming at least one part by an amorphous magnetic alloy, providing a circuit which is energized by a coil, and deflecting said alloy at the time of pressure application so that internal stress is decreased. CONSTITUTION:A thin plate 1 of an amorphous magnetic alloy is arranged at the opening side of a soft magnetic body 2. The body 2 has an outer circular wall, a circular bottom part, and a circular cylinder part, whose height of the end surface is the same as the outer circular wall. The thin plate is deflected to the side of the magnetic body 2 by a lid part pushing tool 3 having pressure transmitting holes 31. A magnetic circuit comprising the thin plate 1 and the magnetic body 2 is excited by a coil 4. A current is supplied to the coil 4 through a coil terminal 42, which is taken out of a hole 41 of the magnetic body 2. In this way, a large amount of strain (stress) is applied to the part of the thin plate corresponding to the groove part of the magnetic body 2. A returning force F to a flat shaped plate is yielded in the thin plate 1. When a pressure P is applied to the thin plate 1, the internal stress is decreased. When the strain is made large, the reduction in the internal stress due to the pressure P can be uniquely determined by the magnitude of the pressure P. |
