FABRICATION OF PHOTO-ELECTRIC CONVERTING APPARATUS

摘要

PURPOSE:To eliminate factors of lowering yield, namely the factors of fluctuating output characteristic by forming a photo-conductive material with the lift-off method. CONSTITUTION:A resist pattern 13 having the specified shape is formed on an insulating transparent substrate 12 and a II-VI Group compound is vacuum- deposited thereon as a photoconductive material 14. Next, the photo-conductive material on the photo resist is peeled and thereby the photo-conductive material array consisting of islands formed in a line is formed in the main scanning direction on the substrate 12. Next, the element is subjected to the heat processing at a temperature higher than the eutectic temperature of the photoconductive material 14 and one or more kinds of halogenide of cadmium under the ambient containing the vapor of one or more kinds of halogenide of cadmium. Thereby the individual electrode group corresponding to the photoconductive material array and the photoconductive material array are grouped for each constant number, and a common electrode opposing to the individual electrode is formed by the lift-off method for each group.