| 摘要 |
PURPOSE:To remove pellets, dielectric resistanc thereof is derective, completely, and to manufacture the device at approximately the same cost as conventional devices without resulting in the increase of an area of a novel pellet by providing a monitor element, which contains a reverse conduction type semiconductor layer isolated and made independent and can measure dielectric resistance. CONSTITUTION:A dielectric-resistance check monitor element is formed, and dielectric resistance is measured at every pellet as one step of the check of characteristics of an IC In a P/W check. A base is diffused to the monitor element and the element is oxidized to form a region 15, and an oxide 13 is removed extending over a range wider than a window, with which a probe is brought into contact in a preprocess, and an emitter is diffused and the element is oxidized. A window sufficient for bringing a probe for checking characteristics on the P/W check into contact and a metallic electrode 17 are formed, and a novel monitor element for checking dielectric resistance is completed. |
