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发明名称
摘要
申请公布号	JPS592132(U)	申请公布日期	1984.01.09
申请号	JP19820097754U	申请日期	1982.06.29
申请人		发明人
分类号	C23C16/50;H01L21/205;H01L21/31;(IPC1-7):H01L21/205;C23C11/00	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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