| 摘要 |
PURPOSE:To obtain a highly reliable ink jet recording head, by providing a metal protecting layer on a substrate, on which an ink jetting pressure generating element is provided, treating the surface of the layer with a silane coupling agent, and thereafter laminating a photosensitive resin. CONSTITUTION:An ink jetting pressure generating element 2 such as a heating element and a piezoelectric element is arranged on a substrate 1 made of a metal and the like. Thereafter, a protecting film 3 comprising a metal is coated. Then, the surface of a substrate 1 is cleaned and a silane coupling agent 4 is laminated. Then, a dry film photoresist 5 is provided thereon. A photomask 6 is layered, and exposure to light is performed from the upper side. The unexposed part is removed by a solvent, and an ink path 9 is formed. To the substrate 1, wherein the ink path 9 is formed by the cured dry film photoresist 5P, a flat plate 8, which is to become a coating layer, is bonded by a bonding agent 7 and fixed. |
