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发明名称
摘要
申请公布号
JPS58193645(U)
申请公布日期
1983.12.23
申请号
JP19820091508U
申请日期
1982.06.21
申请人
发明人
分类号
H01L21/338;H01L29/47;H01L29/80;H01L29/812;H01L29/872;(IPC1-7):H01L29/80;H01L29/54
主分类号
H01L21/338
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代理人
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