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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPS58221275(A)
申请公布日期
1983.12.22
申请号
JP19820102260
申请日期
1982.06.16
申请人
NICHIDEN ANELVA KK
发明人
KOBAYASHI SHIYUNYOU;FUNAKI HIDEFUMI;SAKURAI TAKEHIRO
分类号
C23C14/36;C23C14/35;H01F41/18;H01J37/34;H01L21/285
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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