| 摘要 |
PURPOSE:To obtain a color sensor which has a small size and good directivity and can recognize micro patterns by a method wherein the sensor is constituted by arranging solar batteries so as to receive the transmitting through a photo transmitting substrate and an interference filter and then convert it into an electrical signal. CONSTITUTION:The Fabry-Perot interference filter as blue, green, and filters 33B, 33G, and 33R is formed on the clear substrate 31. A phototransmitting film 41 is formed, and individual solar batteries 43B, 43G, and 43R are formed above the filters 33B, 33G, and 33R which are corresponding thereto by a photo fabricating process. Since the sensor is manufactured by a photo fabricating process, the density of forming the filters and solar batteries is determined according to processes, and the sensor can be extremely miniaturized. Besides, the interference filters and solar batteries are very close to each other, therefore they function accurately to the oblique incident light. |
